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Apparatus and method for characterizing thin film and interfaces using an optical heat generator and detector

United States Patent

5,748,317
May 5, 1998
View the Complete Patent at the US Patent & Trademark Office
An optical heat generation and detection system generates a first non-destructive pulsed beam of electromagnetic radiation that is directed upon a sample containing at least one interface between similar or dissimilar materials. The first pulsed beam of electromagnetic radiation, a pump beam (21a), produces a non-uniform temperature change within the sample. A second non-destructive pulsed beam of electromagnetic radiation, a probe beam (21b), is also directed upon the sample. Physical and chemical properties of the materials, and of the interface, are measured by observing changes in a transient optical response of the sample to the probe beam, as revealed by a time dependence of changes in, by example, beam intensity, direction, or state of polarization. The system has increased sensitivity to interfacial properties including defects, contaminants, chemical reactions and delaminations, as compared to conventional non-destructive, non-contact techniques. One feature of this invention is a determination of a Kapitza resistance at the interface, and the correlation of the determined Kapitza resistance with a characteristic of the interface, such as roughness, delamination, the presence of contaminants, etc.
Maris; Humphrey J (Barrington, RI), Stoner; Robert J (Duxbury, MA)
Brown University Research Foundation (Providence, RI)
08/ 786,706
January 21, 1997
STATEMENT OF GOVERNMENT RIGHTS This invention was made with government support under grant number DE-FG02-ER45267 awarded by the Department of Energy, and grant number DMR-9121747 awarded by the National Science Foundation. The government has certain rights in the invention.