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Temperature-insensitive vertical-cavity surface-emitting lasers and method for fabrication thereof

United States Patent

*** EXPIRED ***
January 27, 1998
View the Complete Patent at the US Patent & Trademark Office
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A temperature-insensitive vertical-cavity surface-emitting laser (VCSEL) and method for fabrication thereof. The temperature-insensitive VCSEL comprises a quantum-well active region within a resonant cavity, the active region having a gain spectrum with a high-order subband (n.gtoreq.2) contribution thereto for broadening and flattening the gain spectrum, thereby substantially reducing any variation in operating characteristics of the VCSEL over a temperature range of interest. The method for forming the temperature-insensitive VCSEL comprises the steps of providing a substrate and forming a plurality of layers thereon for providing first and second distributed Bragg reflector (DBR) mirror stacks with an active region sandwiched therebetween, the active region including at least one quantum-well layer providing a gain spectrum having a high-order subband (n.gtoreq.2) gain contribution, and the DBR mirror stacks having predetermined layer compositions and thicknesses for providing a cavity resonance within a predetermined wavelength range substantially overlapping the gain spectrum.
Chow; Weng W. (Sandia Park, NM), Choquette; Kent D. (Albuquerque, NM), Gourley; Paul L. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
08/ 535,597
September 28, 1995
This invention was made with Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.