An optical non-contact profilometry system and method provided by an optical caliper with matched optical sensors that are arranged conjugate to each other so that the surface profile and thickness of an article can be measured without using a fixed reference surface and while permitting the article to deflect in space within the acquisition range of the optical sensors. The output signals from the two optical sensors are algebraically added to compensate for any such deflection of the article and provide a so compensated signal, the balance and sign of which provides a measurement of the actual thickness of the article at the optical sensors.
This invention was made with the support of the United States Government under contract No. DE-AC05-84OR21400 awarded by the U.S. Department of Energy. The United States Government has certain rights in this invention.