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On-clip high frequency reliability and failure test structures

United States Patent

5,625,288
April 29, 1997
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Self-stressing test structures for realistic high frequency reliability characterizations. An on-chip high frequency oscillator, controlled by DC signals from off-chip, provides a range of high frequency pulses to test structures. The test structures provide information with regard to a variety of reliability failure mechanisms, including hot-carriers, electromigration, and oxide breakdown. The system is normally integrated at the wafer level to predict the failure mechanisms of the production integrated circuits on the same wafer.
Snyder; Eric S. (Albuquerque, NM), Campbell; David V. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
08/ 590,690
January 16, 1996
The government has rights to this invention pursuant to Contract No. DE-AC04-76PD00789 awarded by the U.S. Department of Energy.