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Flow-through ion beam source

United States Patent

5,601,654
February 11, 1997
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A method and an apparatus for forming a charge neutral ion beam which is useful in producing thin films of material on electrically conductive or non-conductive substrates are provided.
Springer; Robert W. (Los Alamos, NM)
The Regents of the University of California, Office of Technology (Alameda, CA)
08/ 657,844
May 31, 1996
This invention was made with government support under Contract No. W-7405-ENG-36 awarded by the U.S. Department of Energy. The government has certain rights in the invention.