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Magnetic lens apparatus for a low-voltage high-resolution electron microscope

United States Patent

5,563,415
October 8, 1996
View the Complete Patent at the US Patent & Trademark Office
A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.
Crewe; Albert V. (Palos Park, IL)
Arch Development Corporation (Chicago, IL)
08/ 487,926
June 7, 1995
The United States government has certain rights in the present invention pursuant to Grant DEFG0286ER60437 from the United States Department of Energy.