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Dual beam optical system for pulsed laser ablation film deposition

United States Patent

*** EXPIRED ***
5,558,788
September 24, 1996
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.
Mashburn; Douglas N. (Knoxville, TN)
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
08/ 159,163
November 30, 1993
This invention was made with Government support under contract DE-AC05-840R21400 awarded by the U.S. Department of Energy to Martin Marietta Energy Systems, Inc. and the Government has certain rights in this invention.