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System and method for crystalline sheet growth using a cold block and gas jet

United States Patent

9,957,636
May 1, 2018
View the Complete Patent at the US Patent & Trademark Office
A crystallizer for growing a crystalline sheet from a melt may include a cold block having a cold block surface that faces an exposed surface of the melt, the cold block configured to generate a cold block temperature at the cold block surface that is lower than a melt temperature of the melt at the exposed surface. The system may also include a nozzle disposed within the cold block and configured to deliver a gas jet to the exposed surface, wherein the gas jet and the cold block are interoperative to generate a process zone that removes heat from the exposed surface at a first heat removal rate that is greater than a second heat removal rate from the exposed surface in outer regions outside of the process zone.
Kellerman; Peter L. (Essex, MA), Mackintosh; Brian (Concord, MA), Carlson; Frederick M. (Potsdam, NY), Morrell; David (Wakefield, MA), Moradian; Ala (Beverly, MA), Desai; Nandish (Waltham, MA), Sun; Dawei (Nashua, NH), Sinclair; Frank (Boston, MA)
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. (Gloucester, MA)
14/ 226,991
March 27, 2014
STATEMENT AS TO FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided for by the terms of contract number DE-EE0000595 awarded by the U.S. Department of Energy.