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On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer

United States Patent

9,939,587
April 10, 2018
View the Complete Patent at the US Patent & Trademark Office
An on-chip optical filter having Fabri-Perot resonators and a spectrometer may include a first sub-wavelength grating (SWG) reflecting layer and a second SWG reflecting layer facing each other. A plurality of Fabri-Perot resonators are formed by the first SWG reflecting layer and the second SWG reflecting layer facing each other. Each of the Fabri-Perot resonators may transmit light corresponding to a resonance wavelength of the Fabri-Perot resonator. The resonance wavelengths of the Fabri-Perot resonators may be determined according to duty cycles of grating patterns.
Han; Seunghoon (Suwon-si, KR), Horie; Yu (Pasadena, CA), Faraon; Andrei (Pasadena, CA), Arbabi; Amir (Pasadena, CA)
SAMSUNG ELECTRONICS CO., LTD. (Suwon-Si, KR), CALIFORNIA INSTITUTE OF TECHNOLOGY (Pasadena, CA)
15/ 249,608
August 29, 2016
This invention was made with government support under Grant No. W911NF-14-1-0345 awarded by the U.S. Army and under Grant No. DE-SC0001293 awarded by the Department of Energy. The government has certain rights in the invention.