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Particle and chemical control using tunnel flow

United States Patent

9,759,912
September 12, 2017
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.
Chilese; Frank (San Ramon, CA), Delgado; Gildardo R. (Livermore, CA), Wack; Daniel (Fredericksburg, VA), Torczynski; John R. (Albuquerque, NM), Klebanoff; Leonard E. (Dublin, CA)
KLA-Tencor Corporation (Milpitas, CA)
14/ 034,273
20140085724
September 23, 2013
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made under a CRADA (SC11/01785.00) between KLA-Tencor and Sandia Corporation, operated for the United States Department of Energy. The Government has certain rights in this invention. This invention was developed with Government support under Contract No. DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.