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Methods for enhancing P-type doping in III-V semiconductor films

United States Patent

9,721,810
August 1, 2017
View the Complete Patent at the US Patent & Trademark Office
Methods of doping a semiconductor film are provided. The methods comprise epitaxially growing the III-V semiconductor film in the presence of a dopant, a surfactant capable of acting as an electron reservoir, and hydrogen, under conditions that promote the formation of a III-V semiconductor film doped with the p-type dopant. In some embodiments of the methods, the epitaxial growth of the doped III-V semiconductor film is initiated at a first hydrogen partial pressure which is increased to a second hydrogen partial pressure during the epitaxial growth process.
Liu; Feng (Salt Lake City, UT), Stringfellow; Gerald (Salt Lake City, UT), Zhu; Junyi (Lakewood, CO)
University of Utah Research Foundation (Salt Lake City, UT)
13/ 322,403
20130203243
October 28, 2011
REFERENCE TO GOVERNMENT RIGHTS This invention was made with government support under grant number DE-FG02-04ER46148 awarded by the U.S. Department of Energy. The US government has certain rights in this invention.