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Frequency and amplitude stabilization in MEMS and NEMS oscillators

United States Patent

9,680,414
June 13, 2017
View the Complete Patent at the US Patent & Trademark Office
This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an "autonomous" frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.
Chen; Changyao (Wilmette, IL), Lopez; Omar Daniel (Chicago, IL), Czaplewski; David A. (Naperville, IL)
UCHICAGO ARGONNE, LLC (Chicago, IL)
15/ 042,912
February 12, 2016
The United States Government has rights in this invention pursuant to Contract No. DE-AC02-06CH11357 between the United States Department of Energy and the UChicago Argonne, LLC, representing Argonne National Laboratory.