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Capacitance reduction for pillar structured devices

United States Patent

9,645,262
May 9, 2017
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
In one embodiment, an apparatus includes: a first layer including a n+ dopant or p+ dopant; an intrinsic layer formed above the first layer, the intrinsic layer including a planar portion and pillars extending above the planar portion, cavity regions being defined between the pillars; and a second layer deposited on a periphery of the pillars thereby forming coated pillars, the second layer being substantially absent on the planar portion of the intrinsic layer between the coated pillars. The second layer includes an n+ dopant when the first layer includes a p+ dopant. The second layer includes a p+ dopant when the first layer includes an n+ dopant. The apparatus includes a neutron sensitive material deposited between the coated pillars and above the planar portion of the intrinsic layer. In additional embodiments, an upper portion of each of the pillars includes a same type of dopant as the second layer.
Shao; Qinghui (Fremont, CA), Conway; Adam (Livermore, CA), Nikolic; Rebecca J. (Oakland, CA), Voss; Lars (Livermore, CA), Bhat; Ishwara B. (Clifton Park, NY), Harrison; Sara E. (Fremont, CA)
Lawrence Livermore National Security, LLC (Livermore, CA), Bhat; Ishwara B. (Clifton Park, NY)
14/ 555,463
November 26, 2014
The United States Government has rights in this invention pursuant to Contract No. DE-AC52-07NA27344 between the United States Department of Energy and Lawrence Livermore National Security, LLC for the operation of Lawrence Livermore National Laboratory.