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Single crystal micromechanical resonator

United States Patent

9,641,154
May 2, 2017
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A single crystal micromechanical resonator includes a suspended plate of lithium niobate or lithium tantalate. The suspended plate and a support structure are formed from a single crystal.
Olsson; Roy H. (Albuquerque, NM), Friedmann; Thomas A. (Albuquerque, NM), Jensen Homeijer; Sara (Albuquerque, NM), Wiwi; Michael (Albuquerque, NM), Hattar; Khalid Mikhiel (Albuquerque, NM), Clark; Blythe (Albuquerque, NM), Bauer; Todd (Albuquerque, NM), Van Deusen; Stuart B. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
15/ 349,593
November 11, 2016
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.