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Capacitive microelectromechanical switches with dynamic soft-landing

United States Patent

January 3, 2017
View the Complete Patent at the US Patent & Trademark Office
A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
Jain; Ankit (West Lafayette, IN), Alam; Muhammad Ashraful (West Lafayette, IN), Nair; Pradeep (Maharashtra, IN)
14/ 881,185
October 13, 2015
GOVERNMENT SUPPORT This invention was made with government support under DE-FC52-08NA28617 awarded by the Department of Energy. The government has certain rights in the invention.