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Chemical vapor deposition using N,O polydentate ligand complexes of metals

United States Patent

December 27, 2016
View the Complete Patent at the US Patent & Trademark Office
Complexes of metals and N,O polydentate ligands are useful as precursors in the preparation of doped zinc oxide coatings by chemical vapor deposition.
Bluhm; Martin E. (Westfield, NJ), Silverman; Gary S. (Chadds Ford, PA), Korotkov; Roman Y. (Boothwyn, PA)
Arkema Inc. (King of Prussia, PA)
13/ 377,858
June 9, 2010
GOVERNMENT RIGHTS STATEMENT This invention was made with government support under Contract No. DE-FC26-08NT01576 awarded by the Department of Energy. The Government has certain rights in this invention.