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Single crystal micromechanical resonator and fabrication methods thereof

United States Patent

December 20, 2016
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
The present invention relates to a single crystal micromechanical resonator. In particular, the resonator includes a lithium niobate or lithium tantalate suspended plate. Also provided are improved microfabrication methods of making resonators, which does not rely on complicated wafer bonding, layer fracturing, and mechanical polishing steps. Rather, the methods allow the resonator and its components to be formed from a single crystal.
Olsson; Roy H. (Albuquerque, NM), Friedmann; Thomas A. (Albuquerque, NM), Homeijer; Sara Jensen (Albuquerque, NM), Wiwi; Michael (Albuquerque, NM), Hattar; Khalid Mikhiel (Albuquerque, NM), Clark; Blythe (Albuquerque, NM), Bauer; Todd (Albuquerque, NM), Van Deusen; Stuart B. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
14/ 288,236
May 27, 2014
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.