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Mechanical alignment of substrates to a mask

United States Patent

9,490,153
November 8, 2016
View the Complete Patent at the US Patent & Trademark Office
A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
Webb; Aaron P. (Austin, TX), Carlson; Charles T. (Cedar Park, TX), Honan; Michael (Peabody, MA), Amato; Luigi G. (Hampton Falls, NH), Grant; Christopher Neil (Dripping Springs, TX), Strassner; James D. (Austin, TX)
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
14/ 323,088
July 3, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under Contract No. DE-EE0004737 awarded by the Department of Energy. The Government has certain rights in this invention.