Skip to Content
Find More Like This
Return to Search

Micropores and methods of making and using thereof

United States Patent

August 2, 2016
View the Complete Patent at the US Patent & Trademark Office
Microfluidic Devices
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Perroud; Thomas D. (San Jose, CA), Patel; Kamlesh D. (Dublin, CA), Meagher; Robert J. (Mountain House, CA)
Sandia Corporation (Albuquerque, NM)
14/ 057,170
October 18, 2013
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT Employees of Sandia National Laboratories made this invention. The government has certain rights in the invention.