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Micropores and methods of making and using thereof

United States Patent

9,404,913
August 2, 2016
View the Complete Patent at the US Patent & Trademark Office
Microfluidic Devices
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2.times. a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Perroud; Thomas D. (San Jose, CA), Patel; Kamlesh D. (Dublin, CA), Meagher; Robert J. (Mountain House, CA)
Sandia Corporation (Albuquerque, NM)
14/ 057,170
October 18, 2013
ACKNOWLEDGEMENT OF GOVERNMENT SUPPORT Employees of Sandia National Laboratories made this invention. The government has certain rights in the invention.