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Low-stress doped ultrananocrystalline diamond

United States Patent

9,475,690
October 25, 2016
View the Complete Patent at the US Patent & Trademark Office
Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.
Sumant; Anirudha V. (Plainfield, IL), Buja; Federico (Rotterdam, NL), van Spengen; Willem Merlijn (Leiden, NL)
UChicago Argonne, LLC (Chicago, IL)
14/ 283,098
20160101974
May 20, 2014
STATEMENT OF GOVERNMENT INTEREST The United States Government has rights in the invention described herein pursuant to Contract No. DE-AC02-06CH11357 between the United States Department of Energy and UChicago Argonne, LLC, as operator of Argonne National Laboratory.