Skip to Content
Find More Like This
Return to Search

Fabrication method for small-scale structures with non-planar features

United States Patent

September 20, 2016
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.
Burckel; David Bruce (Albuquerque, NM), Ten Eyck; Gregory A. (Albuquerque, NM)
Sandia Corporation (Albquerque, NM)
14/ 548,070
November 19, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under Prime Contract Number DE-AC04-94AL85000 awarded by U.S. Department of Energy The government has certain rights in the invention.