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Liquid flow cells having graphene on nitride for microscopy

United States Patent

September 20, 2016
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
This disclosure provides systems, methods, and apparatus related to liquid flow cells for microscopy. In one aspect, a device includes a substrate having a first and a second oxide layer disposed on surfaces of the substrate. A first and a second nitride layer are disposed on the first and second oxide layers, respectively. A cavity is defined in the first oxide layer, the first nitride layer, and the substrate, with the cavity including a third nitride layer disposed on walls of the substrate and the second oxide layer that define the cavity. A channel is defined in the second oxide layer. An inlet port and an outlet port are defined in the second nitride layer and in fluid communication with the channel. A plurality of viewports is defined in the second nitride layer. A first graphene sheet is disposed on the second nitride layer covering the plurality of viewports.
Adiga; Vivekananda P. (Albany, CA), Dunn; Gabriel (Berkeley, CA), Zettl; Alexander K. (Kensington, CA), Alivisatos; A. Paul (Berkeley, CA)
The Regents of the University of California (Oakland, CA)
14/ 817,551
August 4, 2015
STATEMENT OF GOVERNMENT SUPPORT This invention was made with government support under Contract No. DE-AC02-05CH11231 awarded by the U.S. Department of Energy, under Award No. HDTRA1-13-1-0035 awarded by the Defense Threat Reduction Agency (DTRA), and under Grant No. EEC-0832819 awarded by the National Science Foundation (NSF). The government has certain rights in this invention.