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Monolithic active pixel radiation detector with shielding techniques

United States Patent

September 6, 2016
View the Complete Patent at the US Patent & Trademark Office
A monolithic active pixel radiation detector including a method of fabricating thereof. The disclosed radiation detector can include a substrate comprising a silicon layer upon which electronics are configured. A plurality of channels can be formed on the silicon layer, wherein the plurality of channels are connected to sources of signals located in a bulk part of the substrate, and wherein the signals flow through electrically conducting vias established in an isolation oxide on the substrate. One or more nested wells can be configured from the substrate, wherein the nested wells assist in collecting charge carriers released in interaction with radiation and wherein the nested wells further separate the electronics from the sensing portion of the detector substrate. The detector can also be configured according to a thick SOA method of fabrication.
Deptuch; Grzegorz W. (Forest Park, IL)
Fermi Research Alliance, LLC (Batavia, IL)
13/ 893,514
May 14, 2013
STATEMENT OF GOVERNMENT RIGHTS The invention disclosed in this application was made with Government support under the Fermi Research Alliance, LLC, contract Number DE-AC02-07CH11359 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.