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Multi-channel gas-delivery system

United States Patent

September 13, 2016
View the Complete Patent at the US Patent & Trademark Office
One embodiment of the present invention provides a gas-delivery system for delivering reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for receiving reaction gases and a gas-delivery plate that includes a plurality of gas channels. A gas channel includes a plurality of gas holes for allowing the reaction gases to enter the reactor chamber from the gas channel. The gas-delivery system further includes a plurality of sub-gas lines coupling together the main gas-inlet port and the gas-delivery plate, and a respective sub-gas line is configured to deliver a portion of the received reaction gases to a corresponding gas channel.
Rozenzon; Yan (San Carlos, CA), Trujillo; Robert T. (Saratoga, CA), Beese; Steven C. (Fremont, CA)
SolarCity Corporation (San Mateo, CA)
12/ 952,127
November 22, 2010
This invention was made with government support under DE-EE0000589 awarded by Department of Energy. The government has certain rights in the invention.