A low-power miniaturized photoacoustic sensor uses an optical microphone made by semiconductor fabrication techniques, and optionally allows for all-optical communication to and from the sensor. This allows integration of the photoacoustic sensor into systems with special requirements, such as those that would be reactive in an electrical discharge condition. The photoacoustic sensor can also be operated in various other modes with wide application flexibility.
STATEMENT OF GOVERNMENTAL INTEREST
This invention was developed under Contract DE-AC04-97AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.