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Nanopatterned articles produced using surface-reconstructed block copolymer films

United States Patent

June 7, 2016
View the Complete Patent at the US Patent & Trademark Office
Nanopatterned surfaces are prepared by a method that includes forming a block copolymer film on a substrate, annealing and surface reconstructing the block copolymer film to create an array of cylindrical voids, depositing a metal on the surface-reconstructed block copolymer film, and heating the metal-coated block copolymer film to redistribute at least some of the metal into the cylindrical voids. When very thin metal layers and low heating temperatures are used, metal nanodots can be formed. When thicker metal layers and higher heating temperatures are used, the resulting metal structure includes nanoring-shaped voids. The nanopatterned surfaces can be transferred to the underlying substrates via etching, or used to prepare nanodot- or nanoring-decorated substrate surfaces.
Russell; Thomas P. (Amherst, MA), Park; Soojin (Amherst, MA), Wang; Jia-Yu (Chicago, IL), Kim; Bokyung (Amherst, MA)
13/ 944,329
July 17, 2013
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH & DEVELOPMENT The U.S. Government has certain rights in this invention pursuant to National Science Foundation MRSEC on Polymers Grant No. DMR-0213695, and Department of Energy, Office of Basic Energy Sciences Grant No. DE-FG02-96ER45612.