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Replication of patterned thin-film structures for use in plasmonics and metamaterials

United States Patent

May 31, 2016
View the Complete Patent at the US Patent & Trademark Office
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
Norris; David J. (Roseville, MN), Han; Sang Eon (Cambridge, MA), Nagpal; Prashant (Minneapolis, MN), Bhan; Aditya (Minneapolis, MN), Lindquist; Nathan Charles (Vadnais Heights, MN), Oh; Sang-Huyn (Plymouth, MN)
Regents of the University of Minnesota (St. Paul, MN)
14/ 578,873
December 22, 2014
GOVERNMENT RIGHTS This invention was made with government support under DE-FG02-06ER46348 awarded by the Dept. of Energy. The government has certain rights in the invention.