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Multi-part mask for implanting workpieces

United States Patent

May 10, 2016
View the Complete Patent at the US Patent & Trademark Office
A multi-part mask has a pattern plate, which includes a planar portion that has the desired aperture pattern to be used during workpiece processing. The multi-part mask also has a mounting frame, which is used to hold the pattern plate. Prior to assembly, the pattern plate has an aligning portion, which has one or more holes through which reusable alignment pins are inserted. These alignment pins enter kinematic joints disposed on the mounting frame, which serve to precisely align the pattern plate to the mounting frame. After the pattern plate has been secured to the mounting frame, the aligning portion can be detached from the pattern plate. The alignment pins can be reused at a later time. In some embodiments, the pattern plate can later be removed from the mounting frame, so that the mounting frame may be reused.
Webb; Aaron P. (Austin, TX), Carlson; Charles T. (Cedar Park, TX)
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
14/ 322,389
July 2, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under Contract No. DE-EE0004737 awarded by the Department of Energy. The Government has certain rights in this invention.