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Micro electro-mechanical heater

United States Patent

April 19, 2016
View the Complete Patent at the US Patent & Trademark Office
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
Oh; Yunje (Medina, MN), Asif; Syed Amanulla Syed (Bloomington, MN), Cyrankowski; Edward (Woodbury, MN), Warren; Oden Lee (New Brighton, MN)
Hysitron, Inc. (Eden Prairie, MN)
13/ 510,825
August 26, 2010
SBIR NOTICE This invention was made with Government support under (DE-FG02-07ER84812) awarded by the Department of Energy. The Government has certain rights in this invention