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Device and method for creating Gaussian aberration-corrected electron beams

United States Patent

January 19, 2016
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
Electron beam phase gratings have phase profiles that produce a diffracted beam having a Gaussian or other selected intensity profile. Phase profiles can also be selected to correct or compensate electron lens aberrations. Typically, a low diffraction order produces a suitable phase profile, and other orders are discarded.
McMorran; Benjamin (Eugene, OR), Linck; Martin (Heidelberg, DE)
University of Oregon (Eugene, OR), The United States of America, as represented by the Secretary of Commerce (Washington, DC), The Regents of the University of California (Berkeley, CA)
14/ 199,947
March 6, 2014
ACKNOWLEDGMENT OF GOVERNMENT SUPPORT This invention was made with government support from the U.S. Department of Commerce and through Contract No. DE-AC02-05CH11231 awarded by the U.S. Department of Energy. The government has certain rights in this invention.