A rolled-up inductor structure for a radiofrequency integrated circuit (RFIC) comprises a multilayer sheet in a rolled configuration comprising multiple turns about a longitudinal axis. The multilayer sheet comprises a conductive pattern layer on a strain-relieved layer, and the conductive pattern layer comprises at least one conductive strip having a length extending in a rolling direction. The at least one conductive strip thereby wraps around the longitudinal axis in the rolled configuration. The conductive pattern layer may also comprise two conductive feed lines connected to the conductive strip for passage of electrical current therethrough. The conductive strip serves as an inductor cell of the rolled-up inductor structure.
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
This invention was made with government support under award numbers ECCS 0747178 and 1309375 from the National Science Foundation, DE-FG02-07ER46471 from the Department of Energy, and N000141110634 from the Office of Naval Research. The government has certain rights in the invention.