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Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same

United States Patent

December 1, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.
Resnick; Paul J. (Albuquerque, NM), Langlois; Eric (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
14/ 340,012
July 24, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.