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Power spectrum analysis for defect screening in integrated circuit devices

United States Patent

November 17, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status.
Tangyunyong; Paiboon (Albuquerque, NM), Cole, Jr.; Edward I. (Albuquerque, NM), Stein; David J. (Seattle, WA)
Sandia Corporation (Albuquerque, NM)
13/ 309,281
December 1, 2011
FEDERALLY SPONSORED RESEARCH The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.