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Tunable cavity resonator including a plurality of MEMS beams

United States Patent

October 20, 2015
View the Complete Patent at the US Patent & Trademark Office
A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
Peroulis; Dimitrios (West Lafayette, IN), Fruehling; Adam (West Lafayette, IN), Small; Joshua Azariah (Lexington Park, MD), Liu; Xiaoguang (West Lafayette, IN), Irshad; Wasim (West Lafayette, IN), Arif; Muhammad Shoaib (West Lafayette, IN)
Purdue Research Foundation (West Lafayette, IN)
13/ 908,201
June 3, 2013
This invention was made with government support under W15P7T-10-C-B019 awarded by the Defense Advanced Research Projects Agency ("DARPA") and DE-FC52-08NA28617 awarded by the National Nuclear Security Administration of the U.S. Department of Energy. The government has certain rights in the invention.