A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.
This invention was made with government support under W15P7T-10-C-B019 awarded by the Defense Advanced Research Projects Agency ("DARPA") and DE-FC52-08NA28617 awarded by the National Nuclear Security Administration of the U.S. Department of Energy. The government has certain rights in the invention.