A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
This invention was made with government support under DE-FC52-08NA28617 awarded by the Department of Energy. The government has certain rights in the invention.
The present U.S. patent application is related to and claims the priority benefit of U.S. Provisional Patent Application Ser. No. 61/483,225, filed May 6, 2011, the contents of which is hereby incorporated by reference in its entirety into this disclosure.