Skip to Content
Find More Like This
Return to Search

Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation

United States Patent

October 13, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
An optical instrument, including a chamber, an object exposed to an interior of the chamber, a source of low-pressure gas, the gas comprising at least one of low-pressure molecular hydrogen gas, low-pressure molecular oxygen and a low-pressure noble gas, the source of low pressure gas being fluidly coupled to the chamber, a low voltage source electrically coupled between the object and a remaining portion of the instrument that is exposed to the interior of the chamber so as to maintain the object at a low voltage relative to the remaining portion, and an EUV/VUV light source adapted to direct EUV/VUV light through the low pressure gas in the chamber onto the object. In such a system, when the EUV/VUV light source is activated ions of the low-pressure gas are formed and directed to the object. The ions may be ions of Hydrogen, Oxygen or a noble gas.
Klebanoff; Leonard E. (Dublin, CA), Delgado; Gildardo R. (Livermore, CA), Hollenshead; Jeromy T. (Albuquerque, NM), Umstadter; Karl R. (Livermore, CA), Starodub; Elena (Sunnyvale, CA), Zhuang; Guorong V. (San Jose, CA)
KLA-Tencor Corporation (Milpitas, CA)
14/ 482,510
September 10, 2014
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with government support under CRADA SC11/01785.00 awarded by Sandia Corporation (a wholly-owned subsidiary of Lockheed Martin Corporation) as operator of Sandia National Laboratories under its U.S. Department of Energy Contract No. DE-AC04-94AL85000. The government has certain rights in the invention.