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In situ optical diagnostic for monitoring or control of sodium diffusion in photovoltaics manufacturing

United States Patent

9,136,184
September 15, 2015
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
A method of fabricating a photovoltaic device 100, includes the steps of providing a glass substrate 102, depositing a molybdenum layer 104 on a surface of the glass substrate, directing light through the glass substrate to the near-substrate region of the molybdenum layer 206, detecting an optical property of the near-substrate region of the molybdenum layer after interaction with the incident light 208 and determining a density of the near-substrate region of the molybdenum layer from the detected optical property 210. A molybdenum deposition parameter may be controlled based upon the determined density of the near-substrate region of the molybdenum layer 218. A non-contact method measures a density of the near-substrate region of a molybdenum layer and a deposition chamber 300.
Li; Jian (Golden, CO), Levi; Dean (Indian Hills, CO), Contreras; Miguel (Golden, CO), Glynn; Stephen (Boulder, CO)
Alliance For Sustainable Energy, LLC (Golden, CO)
14/ 112,033
20140093985
February 17, 2012
The United States Government has rights in this invention under Contract No. DE-AC36-08GO28308 between the United States Department of Energy and the Alliance for Sustainable Energy, LLC, the manager and operator of the National Renewable Energy Laboratory.