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Taxel-addressable matrix of vertical nanowire piezotronic transistors

United States Patent

9,024,395
May 5, 2015
View the Complete Patent at the US Patent & Trademark Office
A tactile sensing matrix includes a substrate, a first plurality of elongated electrode structures, a plurality of vertically aligned piezoelectric members, an insulating layer infused into the piezoelectric members and a second plurality of elongated electrode structures. The first plurality of elongated electrode structures is disposed on the substrate along a first orientation. The vertically aligned piezoelectric members is disposed on the first plurality of elongated electrode structures and form a matrix having columns of piezoelectric members disposed along the first orientation and rows of piezoelectric members disposed along a second orientation that is transverse to the first orientation. The second plurality of elongated electrode structures is disposed on the insulating layer along the second orientation. The elongated electrode structures form a Schottky contact with the piezoelectric members. When pressure is applied to the piezoelectric members, current flow therethrough is modulated.
Wang; Zhong Lin (Atlanta, GA), Wu; Wenzhuo (Atlanta, GA), Wen; Xiaonan (Atlanta, GA)
Georgia Tech Research Corporation (Atlanta, GA)
14/ 019,691
20140070338
September 6, 2013
STATEMENT OF GOVERNMENT INTEREST This invention was made with government support under agreement No. DE-FG02-07ER 46394, awarded by the Department of Energy and under agreement No. CMMI-094 6418, awarded by the National Science Foundation. The government has certain rights in the invention.