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Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes

United States Patent

April 21, 2015
View the Complete Patent at the US Patent & Trademark Office
A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.
Hsu; Wei-Chun (Cambridge, MA), Tong; Jonathan Kien-Kwok (Cambridge, MA), Liao; Bolin (Cambridge, MA), Burg; Brian (Cambridge, MA), Chen; Gang (Carlisle, MA)
Massachusetts Institute of Technology (Cambridge, MA)
13/ 937,713
July 9, 2013
This invention was made with government support under Grant No. DE-FG02-02ER45977 awarded by the Department of Energy. The government has certain rights in the invention.