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Large-scale fabrication of vertically aligned ZnO nanowire arrays

United States Patent

8,829,767
September 9, 2014
View the Complete Patent at the US Patent & Trademark Office
A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.
Wang; Zhong Lin (Marietta, GA), Hu; Youfan (Atlanta, GA), Zhang; Yan (Atlanta, GA), Xu; Chen (Atlanta, GA), Zhu; Guang (Atlanta, GA)
Georgia Tech Research Corporation (Atlanta, GA)
13/ 473,867
20120293047
May 17, 2012
STATEMENT OF GOVERNMENT INTEREST This invention was made with government support under contract No. DE-FG02-07ER46394, awarded by the Department of Energy. The government has certain rights in the invention.