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Micromachined force-balance feedback accelerometer with optical displacement detection

United States Patent

July 22, 2014
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
Nielson; Gregory N. (Albuquerque, NM), Langlois; Eric (Albuquerque, NM), Baker; Michael (Albuquerque, NM), Okandan; Murat (Edgewood, NM), Anderson; Robert (Tucson, AZ)
Sandia Corporation (Albuquerque, NM)
13/ 324,012
December 13, 2011
FEDERALLY SPONSORED RESEARCH The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.