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Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere

United States Patent

December 9, 2014
View the Complete Patent at the US Patent & Trademark Office
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We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity.
Allendorf; Mark D. (Pleasanton, CA), Robinson; Alex L. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 253,274
October 5, 2011
STATEMENT OF GOVERNMENT INTEREST The United States Government has rights in this invention pursuant to Contract No. DE-AC04-94AL85000 between the United States Department of Energy and Sandia Corporation, for the operation of the Sandia National Laboratories.