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In-situ sputtering apparatus

United States Patent

June 9, 2015
View the Complete Patent at the US Patent & Trademark Office
Brookhaven National Laboratory - Visit the Office of Technology Commercialization and Partnerships Website
A sputtering apparatus that includes at least a target presented as an inner surface of a confinement structure, the inner surface of the confinement structure is preferably an internal wall of a circular tube. A cathode is disposed adjacent the internal wall of the circular tube. The cathode preferably provides a hollow core, within which a magnetron is disposed. Preferably, an actuator is attached to the magnetron, wherein a position of the magnetron within the hollow core is altered upon activation of the actuator. Additionally, a carriage supporting the cathode and communicating with the target is preferably provided, and a cable bundle interacting with the cathode and linked to a cable bundle take up mechanism provided power and coolant to the cathode, magnetron, actuator and an anode of the sputtering apparatus.
Erickson; Mark R. (Newbury Park, CA), Poole; Henry J. (Ventura, CA), Custer, III; Arthur W. (Oxnard, CA), Hershcovitch; Ady (Mount Sinai, NY)
13/ 782,270
March 1, 2013
STATEMENT RE: FEDERALLY SPONSORED RESEARCH/DEVELOPMENT This invention was made with Government support under contract number DE-AC02-98CH10886, awarded by the U.S. Department of Energy. The Government has certain rights in the invention.