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Microcantilever-based gas sensor employing two simultaneous physical sensing modes

United States Patent

8,762,075
June 24, 2014
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.
Loui; Albert (Dublin, CA), Sirbuly; Donald J. (Encinitas, CA), Elhadj; Selim (Livermore, CA), McCall; Scott K. (Livermore, CA), Hart; Bradley R. (Arlington, VA), Ratto; Timothy V. (Oakland, CA)
Lawrence Livermore National Security, LLC (Livermore, CA)
12/ 852,416
20110077872
August 6, 2010
The United States Government has rights in this invention pursuant to Contract No. DE-AC52-07NA27344 between the United States Department of Energy and Lawrence Livermore National Security, LLC for the operation of Lawrence Livermore National Laboratory.