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Stackable multi-port gas nozzles

United States Patent

8,968,473
March 3, 2015
View the Complete Patent at the US Patent & Trademark Office
One embodiment provides a reactor for material deposition. The reactor includes a chamber and at least one gas nozzle. The chamber includes a pair of susceptors, each having a front side and a back side. The front side mounts a number of substrates. The susceptors are positioned vertically so that the front sides of the susceptors face each other, and the vertical edges of the susceptors are in contact with each other, thereby forming a substantially enclosed narrow channel between the substrates mounted on different susceptors. The gas nozzle includes a gas-inlet component situated in the center and a detachable gas-outlet component stacked around the gas-inlet component. The gas-inlet component includes at least one opening coupled to the chamber, and is configured to inject precursor gases into the chamber. The detachable gas-outlet component includes at least one opening coupled to the chamber, and is configured to output exhaust gases from the chamber.
Poppe; Steve (Pleasanton, CA), Rozenzon; Yan (San Carlos, CA), Ding; Peijun (Saratoga, CA)
Silevo, Inc. (Fremont, CA)
12/ 880,941
September 13, 2010
This invention was made with government support under DE-EE0000589 awarded by Department of Energy. The government has certain rights in the invention.