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Substrate inspection

United States Patent

May 27, 2014
View the Complete Patent at the US Patent & Trademark Office
Various embodiments for substrate inspection are provided.
Ramachandran; Mahendra Prabhu (Palo Alto, CA), Meeks; Steven W. (Palo Alto, CA), Sappey; Romain (San Jose, CA)
KLA-Tencor Corp. (Milpitas, CA)
13/ 472,421
May 15, 2012
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government has certain rights in one or more claims of this invention as provided for by the terms of Contract No. DE-EE0003159 awarded by the Department of Energy--Falcon Program.