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Method of fabricating a micro machine

United States Patent

November 11, 2014
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.
Stalford; Harold L. (Norman, OK)
MicroZeus, LLC (Dallas, TX)
11/ 757,313
June 1, 2007
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government may have certain rights in this invention pursuant to Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy.