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Transparent conducting oxides and production thereof

United States Patent

8,747,630
June 10, 2014
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.
Gessert; Timothy A. (Conifer, CO), Yoshida; Yuki (San Jose, CA), Coutts; Timothy J. (Golden, CO)
Alliance for Sustainable Energy, LLC (Golden, CO)
12/ 130,788
20090297886
May 30, 2008
CONTRACTUAL ORIGIN The United States Government has rights in this invention under Contract No. DE-AC36-99GO10337 between the United States Department of Energy and the National Renewable Energy Laboratory, a Division of the Midwest Research Institute.