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Eddy current thickness measurement apparatus

United States Patent

June 16, 2015
View the Complete Patent at the US Patent & Trademark Office
A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.
Rosen; Gary J. (Manchester, MA), Sinclair; Frank (Quincy, MA), Soskov; Alexander (Danvers, MA), Buff; James S. (Brookline, NH)
Varian Semiconductor Equipment Associates, Inc. (Gloucester, MA)
12/ 862,187
August 24, 2010
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The U.S. Government has a paid-up license in this invention and the right in limited circumstances to require the patent owner to license others on reasonable terms as provided for by the terms of contract number DE-EE0000595 awarded by the U.S. Department of Energy.