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Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules

United States Patent

April 21, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Internal nodes of a constituent integrated circuit (IC) package of a multichip module (MCM) are protected from excessive charge during plasma cleaning of the MCM. The protected nodes are coupled to an internal common node of the IC package by respectively associated discharge paths. The common node is connected to a bond pad of the IC package. During MCM assembly, and before plasma cleaning, this bond pad receives a wire bond to a ground bond pad on the MCM substrate.
Rodenbeck; Christopher T. (Albuquerque, NM), Girardi; Michael (Overland Park, KS)
Sandia Corporation (Albuquerque, NM), Honeywell Federal Manufacturing & Technologies, LLC (Kansas City, KS)
13/ 945,074
July 18, 2013
This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy, and under Contract DE-NA0000622 between Honeywell Federal Manufacturing 85 Technologies, LLC and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.